Zoo tagnrho etching txheej txheem cov yam ntxwv

Cov txheej txheem uas zoo tshaj plaws yuav tsum muaj cov yam ntxwv tseem ceeb hauv qab no los ua kom tau raws li cov kev tsim nyog ntawm cov semiconductor thiab lwm yam micro ua liaj teb:

①otropic etching, uas txhais tau tias tsuas yog tsuas yog lateral drilling {}} Tsuas yog nyob rau hauv txoj kev replication ntawm geometric duab zoo ib yam rau cov neeg ntawm kev tawm tsam ntawm etched zaj duab xis;
Zoo etching etching electivity electivity electivity electivity electivity uas etching tus nqi ntawm cov yeeb yaj kiab nyias nyias, kom ntseeg tau ntau dua li ntawd ntawm kev puas tsuaj rau lwm cov ntaub ntawv hauv qab cov duab nyias nyias vim yog tshaj li etching;
③ Cov Khoom Ua Loj Ua Si, Kev Tswj Yooj Yim, Tus nqi qis, Kev Nyab Xeeb Ib Puag Ncig, Haum rau Kev Lag Luam Ntau {}}